JPH0519330Y2 - - Google Patents

Info

Publication number
JPH0519330Y2
JPH0519330Y2 JP1988022258U JP2225888U JPH0519330Y2 JP H0519330 Y2 JPH0519330 Y2 JP H0519330Y2 JP 1988022258 U JP1988022258 U JP 1988022258U JP 2225888 U JP2225888 U JP 2225888U JP H0519330 Y2 JPH0519330 Y2 JP H0519330Y2
Authority
JP
Japan
Prior art keywords
ring
vapor deposition
substrate
substrate holder
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988022258U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01125362U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988022258U priority Critical patent/JPH0519330Y2/ja
Publication of JPH01125362U publication Critical patent/JPH01125362U/ja
Application granted granted Critical
Publication of JPH0519330Y2 publication Critical patent/JPH0519330Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1988022258U 1988-02-22 1988-02-22 Expired - Lifetime JPH0519330Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988022258U JPH0519330Y2 (en]) 1988-02-22 1988-02-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988022258U JPH0519330Y2 (en]) 1988-02-22 1988-02-22

Publications (2)

Publication Number Publication Date
JPH01125362U JPH01125362U (en]) 1989-08-25
JPH0519330Y2 true JPH0519330Y2 (en]) 1993-05-21

Family

ID=31240212

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988022258U Expired - Lifetime JPH0519330Y2 (en]) 1988-02-22 1988-02-22

Country Status (1)

Country Link
JP (1) JPH0519330Y2 (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2625788B1 (de) * 1976-06-09 1977-08-11 Motoren Werke Mannheim Ag Abgasleitung fuer turboaufgeladene brennkraftmaschinen
JPS57111031A (en) * 1980-12-27 1982-07-10 Clarion Co Ltd Sputtering device

Also Published As

Publication number Publication date
JPH01125362U (en]) 1989-08-25

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